Stratio, Inc.

CMP

Equipment: Strasbaugh 6EC

Service Provided

Remove unwanted conductive or dielectric materials on the wafer(s) by utilizing a chemical slurry formulation and mechanical polishing process.

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Procedure
* Shipping Address : 2211 Fortune Drive, Suite A, San Jose, CA 95131

Conditions

  • Wafer: 4” Standard only
  • Accepted materials: Silicon, Germanium, Oxide, Nitride
  • Unaccepted materials: III-V, any Metal and Metal Oxide
  • Unlisted materials: Please contact STNF directly to discuss the use of unlisted materials.